Lam rainbow 4520 manual
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- #Lam rainbow 4520 manual install#
- #Lam rainbow 4520 manual generator#
- #Lam rainbow 4520 manual manual#
- #Lam rainbow 4520 manual portable#
Keyboard, Mouse, USB SW backup, and Cables Lam Research Rainbow 4420 Poly/Nitride Etch System, 8 inch, /3 Contact : Sean Kim at Justin BD&L, Inc. Main Frame with Circuit Breakers, Solenoid Valves *Contact Allwin21 sales for other applications and specifications MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better. Reliability and production-proven technology. The DS4520 offers users a digitally programmable alternative to hardware jumpers and mechanical switches that are being used to control digital logic nodes. The AW-105R is in direct response to manufacturer’s concerns for wafer uniformity, uptime, The DS4520 is a 9-bit nonvolatile (NV) I/O expander with 64 bytes of NV user memory controlled by an I. The AW-105R single-wafer photoresist asher and descum is an automated tool designed as a flexibleġ3.56MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume waferįabrication.
#Lam rainbow 4520 manual generator#
PC controller with Advanced Allwin21 Software.Įndpoint detection (EOP) with Allwin21 SLOPE technology (Optional).Īir-Cooled 600W MKS 13.56 MHz RF Generator (300W Option). Up to 4 wafer size capability without hardware change.įixed cassette station and wafer aligner/cooling station. Best for III-V Materials.įrontside and backside isotropic removal.Ĭonsistent wafer-to-wafer process cycle repeatability.ĥ0mm-150mm wafer capability.
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Integrated solid robotic wafer handling, Single wafer process.
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To support advanced process monitoring and control of critical steps, our product offerings include a line of high-precision mass metrology. Production-proven plasma Asher/Descum system. Our broad portfolio of market-leading products for thin film deposition, plasma etch, photoresist strip, and wafer cleaning are complementary processing steps used throughout semiconductor manufacturing. Lam Rainbow 4700, Lam Rainbow 4420, Lam Rainbow 4520, Lam Rainbow 4620, Lam Rainbow 4720. (LAM, DNS, TEL(Track / Dry ETCH) Summary list for Refurbishment, Modification, Relocation & Upgrade.
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#Lam rainbow 4520 manual manual#
GaAs, InP, GaN, SiC wafer Descum (Mainly) AW-3000 Barrel Batch Desktop Manual Plasma Asher Plasma Descum Equipment. The AW-105R is in direct response to manufacturer’s concerns for wafer uniformity, uptime, reliability and production-proven technology. Lam AutoEtch is a Registered Trademark of Lam Research.The AW-105R single-wafer photoresist asher and descum is an automated tool designed as a flexible 13.56MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication.
#Lam rainbow 4520 manual install#
Install type: Bulkhead Mount configurationĬassette Interface: Hine 38A Wafer Indexers Ergo-Loader Option Dual Endpoint Detection: Channel A: 405nm Channel B: 520nm Classic Software 8¡± Clamped Pedestal Twist-lock EMO Guards RGA Chamber Port SECS Interface Ballast Pressure Regulators 50 FT Long EMO/Interface Cables Breaker type AC/DC Power Box Orbitally Welded Gas Box Gas Line # Gas Flow (sccm) MFC Mfgr MFC Model 1 He 500 Tylan FC-2900V 2 O2 5 Tylan FC-2900V 3 O2 50 Tylan FC-2900V 4 C2F6 500 Tylan FC-2900V 5 SF6 500 Tylan FC-2900V 6 HBr 200 Tylan FC-2900V 7 CL2 500 Tylan FC-2900V 8 NF3 500 Tylan FC-2900V Backside He 50 Unit UFC-1300 Options Include: Remote AC Box RF Cart w/ENI OEM-650 PS Power Requirements: V 208, A 30, Phase 3, Freq 50/60Hz HWiNFO64 (it will run on all 64-bit Windows® versions.
#Lam rainbow 4520 manual portable#
HWiNFO32 (it will run on all 32-bit Windows® versions) is available as an installer, portable and beta files. Condition:Used (Refurbished and warranty is available). The program is available in 3 versions: - HWiNFO (runs only on DOS operating system and you can download it here as we dont have this version listed on this page).